Hydrogen is used in crystal growth and contrast preparation, oxidation process, epitaxy process and chemical deposition (CVD).The semiconductor industry has a high requirement for gas purity. The "incorporation" of trace impurities will change the surface activity of semiconductors.When SIHCI3 is generated from silicon by hydrogen chloride, it is separated by fractionation process and reduced by hydrogen at high temperature to meet the purity requirement of semiconductor: SIHCI3+H2----Si+3HCI. The purity requirement of hydrogen is very high in the above process.The impurities of carbon monoxide and carbon dioxide in hydrogen will oxidize the substrate and form polysilicon. If it contains methane, it will form silicon carbide into the outer layer, causing defects. In the past, the oxygen content was less than 1 * 10-6 and the dew point was lower than - 70c, but now it is more demanding.Hydrogen production by water electrolysis can meet the high requirements of semiconductors for hydrogen.
Why choose Us ?
Economic competitiveness: the best TCO (total cost of ownership) in similar products.
The transmission pressure of electrolytic cell is based on the user's demand,
which significantly reduces the energy required for further compression (low, medium and high pressure)
Safety: series simulation and modeling can improve the quality and safety of our equipment to a remarkable level
The fast dynamic response provides the flexibility needed for electricity market-led operations to completely optimize your investment.
Modular extensible architecture based on megawatt core modules is used as building blocks
Easy to install: The equipment is developed and manufactured by Zhongxinda, and customer's on-site assembly is only limited to interconnection.
We provide hydrogen production equipment, service and fast speed for hydrogenation station, new energy, chemical industry, non-ferrous metal, electric power, iron and steel, aviation and other industries.
Certification:
Pre-Sales Service
* Inquiry and consulting support.
* technical proposal support.
* View our Factory.
After-Sales Service
* Training how to instal the machine, training how to use the machine.
* Engineers available to service machinery overseas.