1600C CVD Furnace with Gas Supply System and Vacuum System

Sales

Sales Manager: Andrea

Email: Andrea@tmaxlaboratory.com

Wechat: 18250801164

Certificate : CE, IOS, ROHS, SGS, UL Certificate
Warranty : Two years limited warranty with lifetime technical support

Product Detail

1600C PECVD Furnace with Gas Supply System and Vacuum System

The PECVD system consists of a tube furnace, a quartz vacuum chamber, a vacuum system, a gas supply system, and a radio frequency power supply system. Mainly used for: growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. It is easy to add functions, and can expand functions such as plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.

Detailed technical parameters

Model

TL1600-I

Power

5KW

Tube size（OD）(mm)

High-purity corundum tube:60mm(tube diameter)

Two furnace plugs are placed on each side. The furnace plug can block the heat radiation in the center of the furnace tube and must be placed in the correct position in the furnace before heating.

Dimension

1120X490X855

supply voltage

220V

phase

single phase

heating element

1800 model silicon molybdenum bar

Temperature control type

Use Yudian program temperature control instrument (standard)

1. 30-segment program temperature control intelligent PID adjustment.

2. With over-temperature protection, the electric furnace heating circuit will be automatically cut off when the temperature is over-temperature or when the couple is broken. ON, the ON light on the panel is off, the OFF light is on, and the electric furnace is limitedly protected).

3. With 485 communication interface (standard with optional software)

4. It has a power failure protection function, that is, when the furnace is powered on after the power is turned off, the program does not start from the initial temperature, but starts from the furnace temperature when the power is off.

5.The meter has the function of temperature self-tuning

(you need to pay extra for the replacement of imported instruments, optional)

FP93 instrument EUROTHERM instrument Touch screen instrument

(shimaden, Japan)

Chamber material

1. The hearth material is made of high quality alumina polycrystalline fiber.

2. The surface of the inner furnace is coated with imported 1800 degree high temperature alumina coating, which can increase the emissivity and make the temperature field more balanced.

Valves and flanges

control precision

+/- 1℃

trigger

Phase-shifted trigger

electric appliance

Zhejiang chint

silicon controlled

106/16E SEMIKRON

Max. temp

1600℃

Rated temp

1550℃

heating rate

≤20℃/ Min(Can be modified as required)

Recommended rate of heating

≤10 ℃/ Min

Thermocouple model

B Type

Length of heating section

300mm

Ambient surface temperature

≤45℃

Vacuum system

VS-0.1 vacuum system

VS-0.1 vacuum system can draw the vacuum degree in the tube furnace tube to0.1Pa(and equipped with resistance vacuum gauge display).

With LED green screen digital display.

Adopt VRD16 vacuum pump

VRD16	Technical term		Specification
VRD-16	Pumping speedm³/h（L/s）	50Hz	16 m³/h
			4.4 L/s
		60Hz	19.2 m³/h
			5.2 L/s
	Limit partial pressure - no gas ballast（Pa）		4x10-2
	Limit total pressure - no gas ballast（Pa）		4x10-1
	Limiting total pressure - gas ballast（Pa）		8x10-1
	power supply		Single phase/three phase
	motor power（KW）		0.75 KW/0.55 KW
	Inlet/outlet connectionDN		KF25
	oil capacity		0.9-1.5 L
	motor speed（rpm）	50Hz	1440 rpm

Gas supply system

Gas flow meter gas supply system

Technical parameters:

l Pneumatic channel: 6

l Pneumatic flow control: use mass flow meter.

l Cabinet size: 600X600X600mm

l With LED display

l Technical parameters of mass flowmeter:

Interface	Φ6
Display	LED
Working environment temperature	5~45℃
Flow controller	Proton flow controller is used, please see the back
Stainless steel tube	Φ6 outside X Φ4 inside
Pressure vacuum table	-0.1～0.15 MPa, 0.01 MPa/div
Stop valve	Φ6
Flow control	PLC intelligent control

Technical parameters of Mass Flow Controller:

Product description: Common type, analog circuit

Product detailed description: Ordinary type, analog circuit, rubber seal, tubular shunt, not easy to block.

Main indicators:

Range	5, 10, 20, 30, 50, 100, 200SCCM(you can choose any range) Please confirm when you place the order
Accuracy	±1% F.S
Linear	0.5% F.S
Repeatability	±0.2% F.S
Response time	1S
Air pressure drop	<0.01MPa
Maximum pressure	3MP
Working environment temperature	5～45℃
Input and output signal	0～+5.00V
Power supply	+15V 50mA -15V 50mA
Dimensions	15830110
Weight	0.9 Kg

Configuration of gas supply system:

Proton flowmeter	6
Mechanical pressure gauge (range -0.1~0.15MPa)	1
Stainless steel globe valves	6
Stainless steel through-plate connectors	6
Stainless steel valve joints	2
stainless steel cylinder connector	6
PTFE tube	30M
Dia80X140MM gas mixing tank	1
Furnaceframe	1 set

RF Generators / RF Power Supplies

Main technical parameters of RF power supply:

Power output range	0-500W
Maximum reflected power	200W
working frequency	RF: 13.56MHZ±0.005%
Power stability	+/-0.1%
Harmonic component	≤-50dbc
Rf region width	0-600mm adjustable
Matching way	automatic
Cooling mode	Points of cold
Noise	<50dB
Radio frequency interface	50Ω N-type
Input power	208-240V 50/60HZ

Warranty

One year warranty and lifetime technical support

Special Note:

1. Consumable parts such as heating elements, furnace tubes, sample crucibles, etc. are not within the warranty period.

2. Damage caused by the use of corrosive gas and acid gas is not covered by the warranty.

Precautions

1. The air pressure in the furnace tube should not be higher than 0.02MPa

2. Due to the high air pressure inside the gas cylinder, a pressure relief valve must be installed on the gas cylinder when gas is introduced into the furnace tube. To ensure safety, it is recommended to use a pressure below 0.02MPa

3. When the furnace tube used is corundum tube, when the furnace body temperature is higher than 1500 ℃, the furnace tube should not be in a vacuum state, and the air pressure in the furnace tube should be equal to the atmospheric pressure.

4. The gas flow into the furnace tube should be less than 200SCCM to avoid the impact of the cold airflow on the hot furnace tube

5. For the sample heating experiment, it is not recommended to close the exhaust valve and inlet valve of the furnace tube flange end. If you need to close the gas valve to heat the sample, you must always pay attention to the indication of the pressure gauge. If the pressure is greater than 0.02MPa, you must immediately open the exhaust valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.) .

6. Do not use graphite crucibles in alumina tubes.

7. MoSi2 heating element should not be used at low temperature (400℃-700℃) for a long time, otherwise it may damage the heating element.